基于Micro-CT光机X射线源的单晶LaB<sub>6</sub>阴极的制备及其性能研究

基于Micro-CT光机X射线源的单晶LaB₆阴极的制备及其性能研究

基金项目:

中国科学院科研装备研制项目（Y740441C71）；重大科学仪器设备开发项目（2017YFF0107202）。

详细信息

Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China

摘要: 本文采用电化学腐蚀方法和聚焦离子束技术制备了单晶LaB₆针尖，借助电子扫描电镜对针尖进行微观形貌分析。在此基础上，研制热解石墨径向夹持直热式单晶LaB₆阴极，对其发射性能及其在Micro-CT应用进行研究。研究表明，单晶LaB₆阴极能够产生高亮度的电子束，提高了X射线亮度，提升了Micro-CT图像质量。
- 显微计算机断层成像 /
- 单晶LaB₆阴极 /
- 发射性能 /
- X射线成像
Abstract: The LaB₆ single crystal tip was prepared by the method of drop-off electrochemical corrosion and the technique of focus ion beam. The micro topography of LaB₆ single crystal tip was analyzed by scanning electron microscope. On this basis, the Vogel-type LaB₆ single crystal cathode is prepared. The emission performance and its application in Micro-CT are studied. The experimental results indicate that the LaB₆ single crystal cathode have higher brightness of electron beam, which can improved the X-ray intensity and the whole performance of Micro-CT.
- micro-computed tomography /
- LaB₆ single crystal cathode /
- emission performance /
- X-ray imaging

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